S165-IL Standard Linear Stage Series
Standard series ironless linear stage with a 165 mm width, travels from 100 mm to 1200 mm, a 50 kg load capacity, speeds up to 2 m/s and high resolution absolute linear encoder feedback.
Product Overview
| Motion Type | Linear |
|---|---|
| Technology | Ironless |
| Product Range | Standard Linear Stages |
| Series | S165 |
Key Performance Specs
- Minimum Travel: 100 mm
- Maximum Travel: 1200 mm
- Continuous Force: 87 mm
- Maximum Speed: 2 m/s
- Maximum Payload: 50 kg
Key Features
- Width 165 mm
- Travels 100 mm to 1200 mm
- High load capacity 50 kg
- Speed 2 m/s
- Nominal force 87 N, peak force 300 N
- High resolution absolute linear encoder
- Side cover to protect against particles
- Ironless linear motor
S165-IL Standard Linear Stage Series
Positioning Linear Stage
The S165-IL is a standard series linear stage with a 165 mm width, designed to withstand demanding industrial conditions across a wide range of sectors. High stiffness and quality components, including a high performance ironless linear motor, heavy duty recirculating ball bearing guides and a precision non-contact absolute linear encoder, set it apart. The encoder is protected from debris by the stage sealing system, while precision recirculating linear bearings, combined with careful machining and assembly, deliver excellent geometric performance.
Ironless Linear Motor
The S165-IL is driven by an ironless linear motor. With no ferromagnetic core in the stator, there is no cogging and no interaction between the stator and the magnet track, which produces exceptionally smooth and precise motion. Combined with high power density in a compact design, this makes the S165-IL well suited to semiconductor manufacturing equipment, medical devices, robotics and other applications where accuracy is essential and space is limited.
Applications for Linear Stages
Precision linear stages are central to applications demanding high levels of accuracy and repeatability. They are widely used in laser cutting, scanning, digital printing, and electronics assembly and inspection. They also feature in processes such as Automatic Optical Inspection (AOI) and laser micro-machining, where ultra precision and accurate scan motion are required. In medical and scientific equipment, precision linear stages are relied on for accuracy and repeatability across every cycle.
Product Specifications: S165-IL Standard Linear Stage Series
| S165 Series | S165-IL-x-100 | S165-IL-x-150 | S165-IL-x-200 | S165-IL-x-250 | S165-IL-x-300 |
| Travel total (mm) | 100 | 150 | 200 | 250 | 300 |
| Position Accuracy uncalibrated (µm typ) | ±4 | ±6 | ±8 | ±9 | ±10 |
| Position Accuracy calibrated (µm) | ±1 | ±1 | ±1.5 | ±1.5 | ±4 |
| Resolution System (nm) | 5 | 5 | 5 | 5 | 5 |
| Repeatability Bi-directional (µm) | ±0.4 | ±0.4 | ±0.4 | ±0.4 | ±0.4 |
| Flatness / Straightness (µm) | ±2.5 | ±3 | ±4 | ±5 | ±6 |
| Yaw, Pitch & Roll (µrad) | ±14 | ±14 | ±20 | ±23 | ±29 |
| Maximum Velocity No Load (mm/s) | 2000 | 2000 | 2000 | 2000 | 2000 |
| Maximum Acceleration (m/s2) | 30 | 30 | 30 | 30 | 30 |
| Nominal Force (N) | 87 | 87 | 87 | 87 | 87 |
| Peak Force (N) | 300 | 300 | 300 | 300 | 300 |
| Load Capacity (kg) | 50 | 50 | 50 | 50 | 50 |
| Stage Weight (kg) | 8.6 | 9.7 | 11.3 | 11.1 | 12 |
| S165 Series | S165-IL-x-400 | S165-IL-x-500 | S165-IL-x-600 | S165-IL-x-800 | S165-IL-x-1000 |
| Travel total (mm) | 400 | 500 | 600 | 800 | 1000 |
| Position Accuracy uncalibrated (µm typ) | ±12 | ±14 | ±15.5 | ±17 | ±18 |
| Position Accuracy calibrated (µm) | ±1.5 | ±2 | ±2 | ±2 | ±2 |
| Resolution System (nm) | 5 | 5 | 5 | 5 | 5 |
| Repeatability Bi-directional (µm) | ±0.4 | ±0.4 | ±0.4 | ±0.4 | ±0.4 |
| Flatness / Straightness (µm) | ±8 | ±9 | ±10 | ±12 | ±14 |
| Yaw, Pitch & Roll (µrad) | ±35 | ±40 | ±45 | ±50 | ±60 |
| Maximum Velocity No Load (mm/s) | 2000 | 2000 | 2000 | 2000 | 2000 |
| Maximum Acceleration (m/s2) | 30 | 30 | 30 | 30 | 30 |
| Nominal Force (N) | 87 | 87 | 87 | 87 | 87 |
| Peak Force (N) | 300 | 300 | 300 | 300 | 300 |
| Load Capacity (kg) | 50 | 50 | 50 | 50 | 50 |
| Stage Weight (kg) | 13.7 | 15.3 | 17 | 20.3 | 23.6 |
| S165 Encoder Feedback Options | Feedback (F1) Absolute | (F1) Signal Period | Feedback (F2) Incremental | (F2) Signal Period | In Position Stability |
| E1 – BISS-C Absolute | BISS-C | 5 nm | +/- 1 µm | ||
| E2 – Incremental 1 Vpp | 1 Vpp | 20 µm | +/- 0.5 nm | ||
| E13 – Custom Options Available |
Product Dimensions: S165-IL Standard Linear Stage Series
| S165 Dimensions (mm) | Travel | Hard Stop | A | B | C |
| S165-IL-x-100 | 100 | 116 | 330 | 165 | 150 |
| S165-IL-x-150 | 150 | 165 | 380 | 190 | 150 |
| S165-IL-x-200 | 200 | 216 | 430 | 215 | 150, 350 |
| S165-IL-x-250 | 250 | 266 | 480 | 240 | 150, 350 |
| S165-IL-x-300 | 300 | 316 | 530 | 265 | 150, 350 |
| S165-IL-x-400 | 400 | 416 | 630 | 315 | 150, 350, 550 |
| S165-IL-x-500 | 500 | 516 | 730 | 365 | 150, 350, 550 |
| S165-IL-x-600 | 600 | 616 | 830 | 415 | 150, 350, 550, 750 |
| S165-IL-x-800 | 800 | 816 | 1030 | 515 | 150, 350, 550, 750, 950 |
| S165-IL-x-1000 | 1000 | 1016 | 1230 | 615 | 150, 350, 550, 750, 950, 1150 |
Product Technical Drawings: S165-IL Standard Linear Stage Series










