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S165-IL Standard Linear Stage Series

Standard series ironless linear stage with a 165 mm width, travels from 100 mm to 1200 mm, a 50 kg load capacity, speeds up to 2 m/s and high resolution absolute linear encoder feedback.

Product Overview

Motion Type

Linear

Technology

Ironless

Product Range

Standard Linear Stages

Series

S165

Key Performance Specs

  • Minimum Travel: 100 mm
  • Maximum Travel: 1200 mm
  • Continuous Force: 87 mm
  • Maximum Speed: 2 m/s
  • Maximum Payload: 50 kg

Key Features

  • Width 165 mm
  • Travels 100 mm to 1200 mm
  • High load capacity 50 kg
  • Speed 2 m/s
  • Nominal force 87 N, peak force 300 N
  • High resolution absolute linear encoder
  • Side cover to protect against particles
  • Ironless linear motor

S165-IL Standard Linear Stage Series

Positioning Linear Stage

The S165-IL is a standard series linear stage with a 165 mm width, designed to withstand demanding industrial conditions across a wide range of sectors. High stiffness and quality components, including a high performance ironless linear motor, heavy duty recirculating ball bearing guides and a precision non-contact absolute linear encoder, set it apart. The encoder is protected from debris by the stage sealing system, while precision recirculating linear bearings, combined with careful machining and assembly, deliver excellent geometric performance.

Ironless Linear Motor

The S165-IL is driven by an ironless linear motor. With no ferromagnetic core in the stator, there is no cogging and no interaction between the stator and the magnet track, which produces exceptionally smooth and precise motion. Combined with high power density in a compact design, this makes the S165-IL well suited to semiconductor manufacturing equipment, medical devices, robotics and other applications where accuracy is essential and space is limited.

Applications for Linear Stages

Precision linear stages are central to applications demanding high levels of accuracy and repeatability. They are widely used in laser cutting, scanning, digital printing, and electronics assembly and inspection. They also feature in processes such as Automatic Optical Inspection (AOI) and laser micro-machining, where ultra precision and accurate scan motion are required. In medical and scientific equipment, precision linear stages are relied on for accuracy and repeatability across every cycle.

Product Specifications: S165-IL Standard Linear Stage Series

S165 Series S165-IL-x-100 S165-IL-x-150 S165-IL-x-200 S165-IL-x-250 S165-IL-x-300
Travel total (mm) 100 150 200 250 300
Position Accuracy uncalibrated (µm typ) ±4 ±6 ±8 ±9 ±10
Position Accuracy calibrated (µm) ±1 ±1 ±1.5 ±1.5 ±4
Resolution System (nm) 5 5 5 5 5
Repeatability Bi-directional (µm) ±0.4 ±0.4 ±0.4 ±0.4 ±0.4
Flatness / Straightness (µm) ±2.5 ±3 ±4 ±5 ±6
Yaw, Pitch & Roll (µrad) ±14 ±14 ±20 ±23 ±29
Maximum Velocity No Load (mm/s) 2000 2000 2000 2000 2000
Maximum Acceleration (m/s2) 30 30 30 30 30
Nominal Force (N) 87 87 87 87 87
Peak Force (N) 300 300 300 300 300
Load Capacity (kg) 50 50 50 50 50
Stage Weight (kg) 8.6 9.7 11.3 11.1 12
S165 Series S165-IL-x-400 S165-IL-x-500 S165-IL-x-600 S165-IL-x-800 S165-IL-x-1000
Travel total (mm) 400 500 600 800 1000
Position Accuracy uncalibrated (µm typ) ±12 ±14 ±15.5 ±17 ±18
Position Accuracy calibrated (µm) ±1.5 ±2 ±2 ±2 ±2
Resolution System (nm) 5 5 5 5 5
Repeatability Bi-directional (µm) ±0.4 ±0.4 ±0.4 ±0.4 ±0.4
Flatness / Straightness (µm) ±8 ±9 ±10 ±12 ±14
Yaw, Pitch & Roll (µrad) ±35 ±40 ±45 ±50 ±60
Maximum Velocity No Load (mm/s) 2000 2000 2000 2000 2000
Maximum Acceleration (m/s2) 30 30 30 30 30
Nominal Force (N) 87 87 87 87 87
Peak Force (N) 300 300 300 300 300
Load Capacity (kg) 50 50 50 50 50
Stage Weight (kg) 13.7 15.3 17 20.3 23.6
S165 Encoder Feedback Options Feedback (F1) Absolute (F1) Signal Period Feedback (F2) Incremental (F2) Signal Period In Position Stability
E1 – BISS-C Absolute BISS-C 5 nm +/- 1 µm
E2 – Incremental 1 Vpp 1 Vpp 20 µm +/- 0.5 nm
E13 – Custom Options Available

Product Dimensions: S165-IL Standard Linear Stage Series

S165 Dimensions (mm) Travel Hard Stop A B C
S165-IL-x-100 100 116 330 165 150
S165-IL-x-150 150 165 380 190 150
S165-IL-x-200 200 216 430 215 150, 350
S165-IL-x-250 250 266 480 240 150, 350
S165-IL-x-300 300 316 530 265 150, 350
S165-IL-x-400 400 416 630 315 150, 350, 550
S165-IL-x-500 500 516 730 365 150, 350, 550
S165-IL-x-600 600 616 830 415 150, 350, 550, 750
S165-IL-x-800 800 816 1030 515 150, 350, 550, 750, 950
S165-IL-x-1000 1000 1016 1230 615 150, 350, 550, 750, 950, 1150

Product Technical Drawings: S165-IL Standard Linear Stage Series

S165-IL Standard Linear Stage Series technical drawing